IEDF Measurement System.
The Semion 3 keV System is a new Retarding Field Energy Analyser (RFEA) which extends the range of the Semion sensor platform. It can measure the ion flux and ion energy distribution function in real time with up to 3 kV peak-peak RF bias voltage applied, three times what the standard Semion system can achieve. The sensor consists of an anodised aluminium wafer (as standard) with a single sensing element placed where the substrate would normally sit. The sensing element can have various current sensitivities depending on the expected plasma density, covering the full range of plasma applications.